VLSI electronics : microstructure science edited by Norman G. Einspruch
Material type:
TextLanguage: English Publication details: Academic Press; New York; 1981; 1981-<1986Description: v. <1-14 > :ill. ;24 cmSubject(s): LOC classification: - TK7874.V56 1981
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المكتبة الرئيسية الطابق الثاني ب | TK7874.V56 1981 (Browse shelf(Opens below)) | 1 | Available | E44496 c.1.v.1. |
Vols. 11-<14> have imprint : Orlando : Academic Press
Includes bibliographies and indexes
v. 1-5. [without special titles] -- v. 6. Materials and process characterization -- v. 7. [without special title] -- v. 8. Plasma processing for VLSI -- v. 9. [without special title] -- v. 10. Surface
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