VLSI electronics : microstructure science
Einspruch, Norman G.
VLSI electronics : microstructure science edited by Norman G. Einspruch - Academic Press New York 1981 1981-<1986 - v. <1-14 > :ill. ;24 cm.
Vols. 11-<14> have imprint : Orlando : Academic Press Includes bibliographies and indexes v. 1-5. [without special titles] -- v. 6. Materials and process characterization -- v. 7. [without special title] -- v. 8. Plasma processing for VLSI -- v. 9. [without special title] -- v. 10. Surface
Integrated circuits -- Very large scale integration.--TK
TK7874.V56 1981
VLSI electronics : microstructure science edited by Norman G. Einspruch - Academic Press New York 1981 1981-<1986 - v. <1-14 > :ill. ;24 cm.
Vols. 11-<14> have imprint : Orlando : Academic Press Includes bibliographies and indexes v. 1-5. [without special titles] -- v. 6. Materials and process characterization -- v. 7. [without special title] -- v. 8. Plasma processing for VLSI -- v. 9. [without special title] -- v. 10. Surface
Integrated circuits -- Very large scale integration.--TK
TK7874.V56 1981
