000			00566cam a22002291 4500
005			202410133957.0
008			240206b |||||||| |||| 00| 0 eng d
100			_aVeronis, Andrew.
041			_aeng
245			_aIntegrated circuit fabrication technology
260			_bReston Pub. Co.
260			_aReston, Va.
260			_c1979
260			_cc1979
300			_ax, 193 p. :ill. ;24 cm.
245			_cAndrew Veronis.
500			_aIncludes index.
020			_a0835930920
650		0	_aIntegrated circuits.
650		0	_xTK
050			_aTK7874.V47
942			_cPRINT
999			_c34315 _d34315
970			_a51 _bMohamad Barham _c51 _dMohamad Barham