| 000 | 00694cam a22002651 4500 | ||
|---|---|---|---|
| 005 | 202410133957.0 | ||
| 008 | 240206b |||||||| |||| 00| 0 eng d | ||
| 100 | _aMorgan, D. V. | ||
| 100 | _aBoard, K. | ||
| 041 | _aeng | ||
| 245 | _aAn introduction to semiconductor microtechnology | ||
| 260 | _bWiley | ||
| 260 | _aChichester | ||
| 260 | _c1983 | ||
| 260 | _cc1983 | ||
| 300 | _axii, 167 p. : ill. , charts ; 23 cm. | ||
| 245 | _cD. V. Morgan , K. Board | ||
| 500 | _a"A Wiley - Interscience publication." | ||
| 500 | _aIncludes Index | ||
| 020 | _a0471901482 | ||
| 650 | 0 | _aMicroelectronics | |
| 650 | 0 | _aSemiconductors | |
| 650 | 0 | _xTK | |
| 050 | _aTK7874.M5336 1983 | ||
| 942 | _cPRINT | ||
| 999 |
_c13154 _d13153 |
||
| 970 |
_a51 _bMohamad Barham _c51 _dMohamad Barham |
||