000 | 00691cam a22002651 4500 | ||
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005 | 202410133957.0 | ||
008 | 240206b |||||||| |||| 00| 0 eng d | ||
100 | _aBrodie, Ivor. | ||
100 | _aMuray, Julius J. | ||
041 | _aeng | ||
245 | _aThe physics of micro fabrication | ||
260 | _bPlenum Press | ||
260 | _aNew York | ||
260 | _c1982 | ||
260 | _cc1982 | ||
270 | _dUS | ||
300 | _axix, 503 p. :ill. ;24 cm. | ||
245 | _cIvor Brodie and Julius J. Muray. | ||
500 | _aIncludes bibliographical references and index. | ||
020 | _a0306408635 | ||
650 | 0 | _aMicroelectronics. | |
650 | 0 | _aThin-film circuits. | |
650 | 0 | _xTK | |
050 | _aTK7874.B73 1982 | ||
942 | _cPRINT | ||
999 |
_c126758 _d126757 |
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970 |
_a51 _bMohamad Barham _c51 _dMohamad Barham |