000			00691cam a22002651 4500
005			202410133957.0
008			240206b |||||||| |||| 00| 0 eng d
100			_aBrodie, Ivor.
100			_aMuray, Julius J.
041			_aeng
245			_aThe physics of micro fabrication
260			_bPlenum Press
260			_aNew York
260			_c1982
260			_cc1982
270			_dUS
300			_axix, 503 p. :ill. ;24 cm.
245			_cIvor Brodie and Julius J. Muray.
500			_aIncludes bibliographical references and index.
020			_a0306408635
650		0	_aMicroelectronics.
650		0	_aThin-film circuits.
650		0	_xTK
050			_aTK7874.B73 1982
942			_cPRINT
999			_c126758 _d126757
970			_a51 _bMohamad Barham _c51 _dMohamad Barham