TY - BOOK AU - Schulz, M. ED - The INFO S 81 Conference on Insulating Films on Semiconductors ED - ED - ED - TI - Insulating films on semiconductors ; proceedings of the Second International Conference , INFOS 81 , Erlangen , Fed. Rep. of Germany , April 27 - 29 , 1981 SN - 0387110216 AV - QC611.8.S5I5 1981 PB - Springer-Verlag KW - Semiconductors KW - Semiconductors films KW - QC ER -