The physics of micro fabrication
Brodie, Ivor. Muray, Julius J.
The physics of micro fabrication Ivor Brodie and Julius J. Muray. - Plenum Press New York 1982 c1982 - xix, 503 p. :ill. ;24 cm.
Includes bibliographical references and index.
0306408635
Microelectronics.
Thin-film circuits.--TK
TK7874.B73 1982
The physics of micro fabrication Ivor Brodie and Julius J. Muray. - Plenum Press New York 1982 c1982 - xix, 503 p. :ill. ;24 cm.
Includes bibliographical references and index.
0306408635
Microelectronics.
Thin-film circuits.--TK
TK7874.B73 1982
